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MEMS microcantilever resonating inside a scanning electron microscope. Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems". MEMS ( micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 ...
Surface acoustic wave sensor. Surface acoustic wave sensors are a class of microelectromechanical systems (MEMS) which rely on the modulation of surface acoustic waves to sense a physical phenomenon. The sensor transduces an input electrical signal into a mechanical wave which, unlike an electrical signal, can be easily influenced by physical ...
A hydrogen sensor is a gas detector that detects the presence of hydrogen. They contain micro-fabricated point-contact hydrogen sensors and are used to locate hydrogen leaks. They are considered low-cost, compact, durable, and easy to maintain as compared to conventional gas detecting instruments. [ 1]
Sensors are usually designed so that the gas supply is limited by diffusion, and thus the output from the sensor is linearly proportional to the gas concentration. This linear output is one of the advantages of electrochemical sensors over other sensor technologies (e.g. infrared), whose output must be linearized before they can be used.
A MEMS magnetic field sensor is a small-scale microelectromechanical systems (MEMS) device for detecting and measuring magnetic fields ( magnetometer ). Many of these operate by detecting effects of the Lorentz force: a change in voltage or resonant frequency may be measured electronically, or a mechanical displacement may be measured optically.
A nondispersive infrared sensor (or NDIR sensor) is a simple spectroscopic sensor often used as a gas detector.It is non-dispersive in the fact that no dispersive element (e.g a prism or diffraction grating as is often present in other spectrometers) is used to separate out (like a monochromator) the broadband light into a narrow spectrum suitable for gas sensing.
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